Oriented niobate ferroelectric thin films for electrical and optical devices
AssigneeNorthwestern University
InventorsBruce W. Wessels, Michael J. Nystrom
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Abstract
SrxBa1−xNb2O6, where x is greater than 0.25 and less than 0.75, and KNbO3 ferroelectric thin films metalorganic chemical vapor deposited on amorphous or cyrstalline substrate surfaces to provide a crystal axis of the film exhibiting a high dielectric susceptibility, electro-optic coefficient, and/or nonlinear optic coefficient oriented preferentially in a direction relative to a crystalline or amorphous substrate surface. Such films can be used in electronic, electro-optic, and frequency doubling components.
Claims10
Electro-optic component comprising a ferroelectric KNbO3 thin film metalorganic chemical vapor deposited on a substrate surface to have a single phase and a crystal axis aligned in a preferential direction of orientation relative to said substrate surface.
Electro-optic component comprising a ferroelectric KNbO3 thin film metalorganic chemical vapor deposited on a substrate surface to have a single phase, a crystal axis of said film preferentially oriented in a direction relative to said substrate surface and to have an optical property comparable to that of bulk KNbO3 material.
Electro-optic component comprising a ferroelectric thin film having a thickness up to about 1100 nanometers and surface roughness, root mean squares, less than or equal to 4 nanometers metalorganic chemical vapor deposited on a substrate.
A frequency doubling component including a ferroelectric KNbO3 thin film metalorganic chemical vapor deposited on a substrate surface to have a single phase and a crystal axis aligned in a preferential direction of orientation relative to said substrate surface.
An electro-optic modulator including a ferroelectric KNbO3 thin film metalorganic chemical vapor deposited on a substrate surface to have a single phase and a crystal axis aligned in a preferential direction of orientation relative to said substrate surface.
An optical waveguide including a ferroelectric KNbO3 thin film metalorganic chemical vapor deposited on a substrate surface to have a single phase and a crystal axis aligned in a preferential direction of orientation relative to said substrate surface.
Electro-optic component comprising a ferroelectric thin film metalorganic chemical vapor deposited on an amorphous substrate surface to have a single phase and a crystal axis aligned in a preferential direction of orientation relative to said amorphous substrate surface.
Electro-optic component comprising a ferroelectric thin film comprising a niobate film metalorganic chemical vapor deposited on an amorphous substrate surface to have a single phase and a crystal axis aligned in a preferential direction of orientation relative to said amorphous substrate surface.
Dependencies are inferred from the claim text.