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US 6,208,392 B1Granted
Metallic standoff for an electro-optical device formed from a fourth or higher metal interconnection layer
AssigneeIntel Corporation
InventorsAnthony C. Miller, Kannan Raj
Life of this patent
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Abstract
An electro-optical device may be defined using metallic standoffs between a top plate and a substrate, such as a silicon substrate in a liquid crystal on silicon (LCOS) technology. In one embodiment, the metallic standoffs may be formed from a metal layer, such as metal four layer, above the metal layer used to form the metal pixel mirrors. In this way, relatively constant and uniform cell thicknesses may be achieved without significantly increasing the processing overhead.
Claims19
A electro-optical device comprising:
- a top plate;
- a silicon substrate including at least three metallic interconnection layers, insulating layers and electrical devices;
- and
- a metallic standoff between said substrate and said top plate, said metallic standoff being formed from a fourth or higher metallic interconnection layer, said metallic interconnection layers providing patterned metallic interconnections between said devices, said layers being separated by said insulating layers.
1 more element
A method of forming an electro-optical device comprising:
- forming a silicon substrate having at least four metallic interconnection layers;
- patterning said metallic interconnection layers to form electrical connections;
- forming a metallic standoff from said fourth metallic interconnection layer insulated from said at least three metallic interconnection layers;
- and
- forming a top plate over said metallic standoff.
2 more elements
A liquid crystal display device comprising:
- a top plate;
- a silicon substrate having electrical devices and at least four metallic interconnection layers formed in said substrate, said metallic interconnection layers providing patterned metallic interconnections between said devices;
- and
- a plurality of metallic standoffs defined in at least one of said metal interconnection layers between said substrate and said top plate.
1 more element
Dependencies are inferred from the claim text.