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US 6,208,063 B1Granted
Surface acoustic wave device having polycrystalline piezoelectric ceramic layers
AssigneeMurata Manufacturing Co., Ltd.
InventorsKatsuhiro Horikawa, Akira Ando
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Abstract
A surface acoustic wave device includes a piezoelectric substrate, and an interdigital transducer provided on the piezoelectric substrate, wherein the piezoelectric substrate includes at least two piezoelectric ceramic layers made of a polycrystalline material. The at least two piezoelectric ceramic layers are stacked so that electrical characteristics and mechanical characteristics thereof vary in a direction that is substantially perpendicular a surface of the piezoelectric substrate upon which the at least two ceramic piezoelectric layers are stacked.
Claims11
A surface acoustic wave device comprising:
- a piezoelectric substrate;
- and
- an interdigital transducer provided on the piezoelectric substrate;
- wherein the piezoelectric substrate includes at least two piezoelectric ceramic layers made of a polycrystalline material and stacked so that electrical characteristics and mechanical characteristics thereof vary in a direction that is substantially perpendicular to a surface of the piezoelectric substrate.
1 more element
Dependencies are inferred from the claim text.