Microactuator with an improved semiconductor substrate and method of forming the same
AssigneeNEC Corporation
InventorKenichiro Suzuki
Life of this patent
Estimating the term…
Abstract
The present invention provides semiconductor substrate for a microactuator having at least a movable part and a stator, wherein the semiconductor substrate has a plurality of semiconductor tapered projections being unitary formed with the semiconductor substrate and being in contact with only part of the stator, and at least a recessed portion defined in plane shape by the semiconductor tapered projections so that the recessed portion extends under entire bottom surfaces of the movable part and under partial bottom surfaces of the stator.
Claims8
A semiconductor substrate for a microactuator having at least a movable part and a stator,
- wherein said semiconductor substrate has a plurality of semiconducotr tapered projections being unitary formed with said semiconductor substrate and being in contact with only part of said stator, and at least a recessed portion defined in plane shape by said semiconductor tapered projections so that said recessed portion extends udner entire bottom surfaces of said movable part and under partial bottom surfaces of said stator.
A microactuator having semiconductor substrate, at least a movable part and a stator,
- wherein said semiconductor substrate has a plurality of semiconductor tapered projections being unitary formed with said semiconductor substrate and being in contact with only part of said stator, and at least a recessed portion defined in plane shape by said semiconductor tapered projections so that said recessed portion extends under entire bottom surfaces of said movable part and under partial bottom surfaces of said stator.
Dependencies are inferred from the claim text.