Method of generating a pulsed metastable atom beam and pulsed ultraviolet radiation and an apparatus therefor

Abstract

A pulse discharge is caused between an electrode in an insulating nozzle 2 jetting a gas in vacuum and a skimmer 8. An apparatus for performing the method includes an insulating nozzle 2 perforated with a gas jet hole 2a at a front end thereof and having a needle-like electrode 5 at an inside thereof, and includes a skimmer 8 formed in a funnel-like shape and having an opening portion 8a at a front end thereof. The opening 8a is arranged at a position remote from the gas jet hole 2a of the insulating nozzle 2 by a predetermined distance. The method and apparatus can be used in the field of measurement, material synthesis and the like with an object of surface science, and can form simultaneously and with high intensity both pulsed metastable atom beam and pulsed ultraviolet radiation which can be preferably used as a probe for investigating the electronic state at a surface of a substance and several layers on the inner side of the surface. It can also preferably be used for removing contamination or for depositing materials on the surface of a substrate by surface chemical reaction.

Dependencies are inferred from the claim text.