Using DUV curing to form a protective coating for color filters
AssigneeIntel Corporation
InventorNeil Wester
Life of this patent
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Abstract
A structure and method for producing color filters with a protective highly cross-linked and densified polymer layer is described. In one embodiment, each filter is coated with a highly cross-linked and densified polymer layer to prevent bleeding of material between closely spaced filters during the fabrication process. In a second embodiment, the highly cross-linked and densified polymer layer is used to protect an array of filters from physical damage during detaping operations. In a third embodiment, the highly cross-linked and densified polymer layer is used before fabrication later filters in a color filter array to prevent damage to previous filter layers.
Claims16
A structure for detecting light comprising:
- at least one light sensor;
- a first color filter formed over the at least one light sensor, the first color filter being made of a polymer including a plurality of surfaces having a first highly cross-linked and densified polymer layer surrounding only the first color filter;
- and
- a second color filter formed over the at least one light sensor and adjacent to the first color filter, the second color filter being made of a polymer including a second pigmented acrylate including at least one surface having a second highly cross-linked and densified polymer layer surrounding only the second color filter.
A method of fabricating a light detecting structure comprising:
- forming a first color filter over a first photodetector on a substrate;
- exposing the first color filter to ultraviolet light during a hard bake process to form a first highly cross-linked and densified polymer layer surrounding only the first color filter;
- forming a second color filter over the first color filter;
- and
- exposing the second color filter to ultraviolet light during a hard bake process to form a second highly cross-linked and densified polymer layer surrounding only the second color filter.
A structure for detecting light comprising:
- at least one light sensor;
- a first color filter formed over the at least one light sensor, the first color filter including a first highly cross-linked and densified polymer layer surrounding only the first color filter;
- and
- a second color filter formed over the at least one light sensor and adjacent to the first color filter, the second color filter including a second highly cross-linked and densified polymer layer surrounding only the second color filter.
Dependencies are inferred from the claim text.