US 6,207,552 B1 · Forming and filling a recess in interconnect for encapsulation to minimize electromigration

Abstract

A strong interface is fabricated by forming and filling a recess on top of an interconnect between the interconnect and an encapsulating layer to prevent the lateral drift of material from the interconnect along the bottom of the encapsulating layer. A recess is formed within the top surface of the interconnect, and diffusion barrier material is deposited within the recess on the top surface of the interconnect. The diffusion barrier material may be epitaxially grown from the interconnect during the deposition of the diffusion barrier material within the recess to promote adhesion of the diffusion barrier material to the interconnect. An encapsulating layer is deposited on top of the diffusion barrier material. The diffusion barrier material and the encapsulating layer are comprised of a similar chemical element to promote adhesion of the diffusion barrier material to the encapsulating layer. The diffusion barrier material within the recess of the interconnect prevents lateral drift of material comprising the interconnect along the encapsulating layer. When the layer of encapsulating dielectric is comprised of silicon nitride, a nitrided surface may be formed on top of the diffusion barrier material by exposing the top of the diffusion barrier material to nitrogen plasma before depositing the encapsulating layer of silicon nitride on top of the diffusion barrier material. The present invention may be used to particular advantage when the interconnect is a copper interconnect and when the layer of encapsulating layer is comprised of silicon nitride.

Claims12

Dependent claims

A method for encapsulating a top surface of an interconnect of an integrated circuit, said interconnect being within an insulating layer, the method including the steps of:

A. forming a recess within said top surface of said interconnect;
B. depositing a diffusion barrier material within said recess on said top surface of said interconnect;
and
C. depositing an encapsulating layer on top of said diffusion barrier material, wherein said diffusion barrier material and said encapsulating layer are comprised of a similar chemical element to promote adhesion of said diffusion barrier material to said encapsulating layer;
and wherein said diffusion barrier material prevents lateral drift of material comprising said interconnect along said encapsulating layer.

2 more elements

A method for encapsulating a top surface of copper interconnect of an integrated circuit, said copper interconnect being within an insulating layer of silicon dioxide, the method including the steps of:

A. forming a recess within said top surface of said copper interconnect during a CMP (Chemical Mechanical Polishing) process of said copper interconnect;
B. enhancing a depth of said recess within said top surface of said copper interconnect by selectively sputtering said copper interconnect;
C. depositing a diffusion barrier material within said recess on said top surface of said copper interconnect, wherein said diffusion barrier material is grown from said copper interconnect during said deposition of said diffusion barrier material within said recess to promote adhesion of said diffusion barrier material to said copper interconnect, and wherein said diffusion barrier material is a selected one of tantalum (Ta), titanium (Ti), tungsten (W), tantalum nitride (TaN), titanium nitride (TiN), and tungsten nitride (WN), and wherein said step C further includes the steps of:
depositing a layer of said diffusion barrier material on said top of said copper interconnect and on top of said insulating layer of silicon dioxide surrounding said copper interconnect;
and
polishing away said layer of said diffusion barrier material with a CMP (Chemical Mechanical Polishing) process from said insulating layer of silicon dioxide surrounding said copper interconnect such that said diffusion barrier material is confined within said recess of said copper interconnect;
D. forming a nitrided surface on top of said diffusion barrier material by exposing said top of said diffusion barrier material to nitrogen plasma;
and
E. depositing an encapsulating layer of silicon nitride on said top of said diffusion barrier material, wherein said nitrided surface on said top of said diffusion barrier material promotes adhesion of said diffusion barrier material to said encapsulating layer of silicon nitride;
and wherein said diffusion barrier material prevents lateral drift of copper along said encapsulating layer of silicon nitride;
and wherein said copper interconnect is surrounded by said diffusion barrier material on sidewalls and bottom of said copper interconnect within said insulating layer.

8 more elements

Dependencies are inferred from the claim text.

Forming and filling a recess in interconnect for encapsulation to minimize electromigration

Life of this patent

Forming and filling a recess in interconnect for encapsulation to minimize electromigration

Life of this patent

Abstract

Claims12