Bond pad design for integrated circuits
AssigneeLucent Technologies Inc.
InventorsSailesh Chittipeddi, Vivian Ryan
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AssigneeLucent Technologies Inc.
InventorsSailesh Chittipeddi, Vivian Ryan
Estimating the term…
The present invention provides a bond pad support structure for use in an integrated circuit having a bond pad located thereon. In one embodiment, the bond pad support structure comprises a support layer that is located below the bond pad and that has an opening formed therein. The bond pad support structure further includes a dielectric layer that is located on the conductive layer and that extends at least partially into the opening to form a bond pad support surface over at least a portion of the opening. The first bond pad support layer, in one embodiment, may comprise a conductive metal and the second bond pad support layer may comprise of a dielectric material. The present invention provides a unique bond pad structure wherein an opening within a first bond pad support layer is at least partially filled with a second bond pad support layer. It is believed that the inter-structural cooperation between these two layers provides a graded composite support structure that acts as a differential force transducer to buffer internal and bonding stresses within an integrated circuit.
A method of fabricating a bond pad support structure in an integrated circuit having a bond pad located thereon, comprising the steps of:
Dependencies are inferred from the claim text.