Method for manufacturing a pressure-measuring device equipped with a resonating element
AssigneeABB Kent-Taylor Limited
InventorEros De Bortoli
Life of this patent
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Abstract
Method for manufacturing a pressure-measuring device comprising a diaphragm of semiconductor material having a resonating element fixed thereto, said diaphragm being exposed to the pressure of a process fluid, wherein it comprises the following phases: i) machining a multilayer semiconductor material to obtain a diaphragm having on the upper side a resonating element, an excitation element and a detection element for measuring the pressure applied to said diaphragm; ii) machining a semiconductor material having one or more layers to obtain a support having a pressure port for the flow of the process fluid; iii) making a bond between the lower side of said diaphragm and the upper side of said support.
Claims19
A method for manufacturing a pressure-measuring device comprising a diaphragm of semiconductor material having a resonating element fixed thereto, said diaphragm being exposed to the pressure of a process fluid, comprising the following phases, whatever the order:
- i) machining a multilayer semiconductor material to obtain a diaphragm having on the upper side a resonating element, an excitation element and a detection element for measuring the pressure applied to said diaphragm;
- ii) machining a semiconductor material having one or more layers to obtain a support having a pressure port for the flow of the process fluid;
- iii) making a bond between the lower side of said diaphragm and the upper side of said support.
Dependencies are inferred from the claim text.