Electrostatic-erasing abrasion-proof coating and method for forming the same
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorKenji Itoh
Life of this patent
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Abstract
An abrasion-proof and static-erasing coating is formed on the contact surface of a contact image sensor. The coating comprises a first film having a high hardness and a low conductivity, a second film formed on the first film and having a low hardness and a high conductivity, and a third film having a high hardness and a high resistivity providing an abrasion-proof insulating external surface.
Claims136
An article having a ceramic surface of a sensor, said ceramic surface coated with an abrasion-proof amorphous carbon coating,
- wherein said carbon coating contains a halogen or hydrogen.
An article having a ceramic surface of a sensor, said surface coated with an abrasion-proof amorphous carbon coating,
- wherein said carbon coating comprises an uppermost abrasion-proof layer, and an underlying region provided between said surface and said uppermost layer and having a lower resistivity than said uppermost layer, and
- wherein said underlying region reduces a residual stress between said uppermost abrasion layer and said surface, and
- wherein said carbon coating contains hydrogen.
An article having a ceramic surface of a sensor, said ceramic surface coated with an abrasion-proof amorphous carbon coating,
- wherein said carbon coating has a Vickers hardness not lower than 500 kg/mm2 and is doped with a halogen or hydrogen.
An article having a ceramic surface of a sensor, said ceramic surface coated with an abrasion-proof amorphous carbon coating,
- wherein said carbon coating has a Vickers hardness not higher than 1000 kg/mm2 in an inner region thereof and is doped with a halogen or hydrogen.
An article having a ceramic surface of a sensor, said surface coated with an abrasion-proof amorphous carbon coating, said carbon coating having a laminar structure including a first layer close to said surface and a second layer distant from said surface, wherein said amorphous carbon coating contains hydrogen.
An article having a sensor having an abrasion-proof surface comprising:
- a substrate having a ceramic surface;
- and
- a protective film formed on said substrate, said protective film including a first layer comprising an abrasion-proof amorphous carbon coating which contains hydrogen and a second layer adjacent to said first layer,
- wherein said second layer is interposed between said first layer and said substrate and a hardness of said second layer is smaller than that of said first layer.
An article having a sensor comprising:
- a substrate having a ceramic surface;
- an adhesive layer provided on said substrate;
- an intermediate layer for alleviating distortion, said intermediate layer being provided on said adhesive layer;
- and
- an abrasion-proof amorphous carbon coating provided on said intermediate layer, wherein said carbon coating contains hydrogen.
An article having a sensor comprising:
- a substrate having a surface comprising a ceramic;
- a first layer provided on said substrate;
- a second layer for alleviating distortion, said second layer being provided on said first layer;
- and
- a third layer provided on said second layer and comprising an abrasion-proof amorphous carbon coating, wherein said carbon coating contains hydrogen.
An article having a sensor comprising:
- a substrate having a ceramic surface;
- a first layer provided on said substrate;
- a second layer for alleviating distortion, said second layer being provided on said first layer;
- a third layer provided on said first layer and comprising an abrasion-proof amorphous carbon coating which contains hydrogen,
- wherein said first layer is for preventing impurity from entering into said second layer and/or for improving adhesivity to said substrate.
An article having a sensor having an abrasion-proof surface comprising:
- a substrate having a ceramic surface;
- and
- a protective film formed on said substrate, said protective film including a first layer comprising an abrasion-proof amorphous carbon coating and a second layer adjacent to said first layer,
- wherein said second layer is interposed between said first layer and said substrate and said carbon coating contains hydrogen.
An article having a ceramic surface of a sensor, said surface coated with an amorphous carbon coating,
- wherein said carbon coating contains a halogen or hydrogen.
An article having a ceramic surface of a sensor, said surface coated with an amorphous carbon coating,
- wherein said carbon coating comprises an uppermost layer, and an underlying region provided between said surface and said uppermost layer and having a lower resistivity than said uppermost layer, and
- wherein said underlying region reduces a residual stress between said uppermost layer and said surface, and said carbon coating further contains hydrogen.
An article having a ceramic surface of a sensor, said surface coated with an amorphous carbon coating,
- wherein said carbon coating has Vickers hardness not lower than 500 kg/mm2 and is doped with a halogen and hydrogen.
An article having a ceramic surface of a sensor, said ceramic surface coated with an amorphous carbon coating,
- wherein said carbon coating has a Vicker hardness not higher than 1000 kg/mm2 in an inner region thereof and is doped with a halogen or hydrogen.
An article having a ceramic surface of a sensor, said surface coated with an amorphous carbon coating which contains hydrogen, said carbon coating having a laminar structure including a first layer close to said surface and a second layer distant from said surface.
An article having a sensor comprising:
- a substrate having a ceramic surface;
- an adhesive layer provided on said substrate and having a function of improving adhesivity to said substrate;
- an intermediate layer for alleviating distortion, said intermediate layer being provided on said adhesive layer;
- and
- an amorphous carbon coating provided on said intermediate layer wherein said carbon coating contains hydrogen.
An article having a sensor comprising:
- a substrate having a ceramic surface;
- a first layer provided on said substrate;
- a second layer for alleviating distortion, said second layer being provided on said first layer;
- and
- a third layer provided on said second layer and comprising an amorphous carbon coating,
- wherein said amorphous carbon coating contains hydrogen.
An article having a sensor comprising:
- a substrate having a ceramic surface;
- a first layer provided on said substrate;
- a second layer for alleviating distortion, said second layer being provided on said first layer;
- a third layer provided on said second layer and comprising an amorphous carbon coating wherein said carbon coating contains hydrogen,
- wherein said first layer is for preventing impurity from entering into said second layer and/or for improving adhesivity to said substrate.
An article having a sensor having a surface comprising:
- a substrate having a ceramic surface;
- and
- a protective film formed on said substrate, said protective film including a first layer comprising an amorphous carbon coating and a second layer adjacent to said first layer,
- wherein said second layer is interposed between said first layer and said substrate and said amorphous carbon coating contains hydrogen.
An article having a ceramic surface of a sensor, said ceramic surface coated with an abrasion-proof amorphous carbon coating,
- wherein said carbon coating has a Vickers hardness not lower than 2000 kg/mm2 and is doped with hydrogen.
An article having a ceramic surface of a sensor, said surface coated with an amorphous carbon coating,
- wherein said carbon coating has Vickers hardness not lower than 2000 kg/mm2 and is doped with hydrogen.
An article having a ceramic surface of a sensor, said ceramic surface coated with an abrasion-proof carbon coating,
- wherein said carbon coating contains hydrogen.
An article having a ceramic surface of a sensor subject to a rubbing action, said ceramic surface coated with an abrasion-proof amorphous carbon coating,
- wherein said carbon coating contains a halogen or hydrogen.
An article having a ceramic surface of a sensor subject to a rubbing action, said surface coated with an amorphous carbon coating,
- wherein said carbon coating contains a halogen or hydrogen.
An article having a ceramic surface of a sensor subject to a rubbing action, said ceramic surface coated with an abrasion-proof amorphous carbon coating,
- wherein said carbon coating has a Vickers hardness not lower than 2000 kg/mm2 and is doped with hydrogen.
An article having a ceramic surface of a sensor subject to a rubbing action, said surface coated with an amorphous carbon coating,
- wherein said carbon coating has Vickers hardness not lower than 2000 kg/mm2 and is doped with hydrogen.
An article having a ceramic surface of a sensor, said ceramic surface coated with a carbon coating,
- wherein said carbon coating contains hydrogen and a hardness of at least a portion of said carbon coating monotonically increases from a first point close to said ceramic surface to a second point more distant from said ceramic surface than said first portion.
An article having a ceramic surface of a sensor, said ceramic surface coated with a protective carbon coating,
- wherein said carbon coating contains hydrogen.
An article having a sensor comprising:
- a substrate having a ceramic surface;
- and
- a film formed on said substrate, said film including a first layer comprising an amorphous carbon coating and a second layer adjacent to said first layer wherein said amorphous carbon coating contains hydrogen,
- wherein said second layer is interposed between said first layer and said substrate and a hardness of said second layer is smaller than that of said first layer.
Dependencies are inferred from the claim text.