Plasma enhanced chemical deposition of conjugated polymer
AssigneeBattelle Memorial Institute
InventorJohn D. Affinito
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Abstract
The method of the present invention has the steps of (a) flash evaporating a conjugated material in an evaporate outlet forming an evaporate; (b) passing the evaporate to a glow discharge electrode creating a glow discharge conjugated monomer plasma from the evaporate; and (c) cryocondensing the glow discharge conjugated monomer plasma on a substrate and crosslinking the glow discharge conjugated monomer plasma thereon, wherein the crosslinking results from radicals created in the glow discharge conjugated monomer plasma and achieves self curing.
Claims51
A method of making a conjugated polymer layer with plasma enhanced chemical vapor deposition of a conjugated material onto a substrate in a vacuum environment, comprising the steps of:
- (a) making an evaporate by receiving said conjugated material into a flash evaporation housing, evaporating said conjugated material on an evaporation surface, and discharging an evaporate of said conjugated material through an evaporate outlet;
- (b) making a monomer plasma from said evaporate by passing said evaporate proximate a glow discharge electrode and creating a glow discharge for making said plasma from the evaporate;
- and
- (c) cryocondensing said monomer plasma onto said substrate;
- wherein said conjugated material is selected from the liquid conjugated monomer phenylacetylene, a liquid unconjugated monomer containing conjugated particles selected from the group consisting of triphenyl diamine derivatives, quinacridone and combinations thereof, or said liquid conjugated monomer containing said conjugated particles.
A method for making conjugated polymer layers in a vacuum chamber, comprising:
- (a) flash evaporating a conjugated material forming an evaporate;
- (b) passing said evaporate to a glow discharge electrode creating a glow discharge conjugated monomer plasma from the evaporate;
- and
- (c) condensing said glow discharge conjugated plasma on a substrate as a condensed conjugated monomer and crosslinking said said condensed conjugated monomer thereon without a separate curing step, said crosslinking resulting from radicals created in said glow discharge plasma wherein said conjugated material is selected from the liquid conjugated monomer phenylacetylene, a liquid unconjugated monomer containing conjugated particles selected from the group consisting of triphenyl diamine derivatives, quinacridone and combinations thereof, or said liquid conjugated monomer containing said conjugated particles.
A method of making a conjugated polymer layer with plasma enhanced chemical vapor deposition of a conjugated material onto a substrate in a vacuum environment, comprising the steps of:
- (a) making an evaporate by receiving said conjugated material into a flash evaporation housing, evaporating said conjugated material on an evaporation surface, and discharging an evaporate of said conjugated material through an evaporate outlet;
- (b) making a monomer plasma from said evaporate by passing said evaporate proximate a glow discharge electrode and creating a glow discharge for making said plasma from the evaporate;
- and
- (c) cryocondensing said monomer plasma onto said substrate;
- wherein said conjugated material is selected from the liquid conjugated monomer phenylacetylene, or the liquid conjugated monomer phenylacetylene containing conjugated particles.
A method of making a conjugated polymer layer with plasma enhanced chemical vapor deposition of a conjugated material onto a substrate in a vacuum environment, comprising the steps of:
- (a) making an evaporate by receiving said conjugated material into a flash evaporation housing, evaporating said conjugated material on an evaporation surface, and discharging an evaporate of said conjugated material through an evaporate outlet;
- (b) making a monomer plasma from said evaporate by passing said evaporate proximate a glow discharge electrode and creating a glow discharge for making said plasma from the evaporate;
- and
- (c) cryocondensing said monomer plasma onto said substrate;
- wherein said conjugated material is selected from a liquid unconjugated monomer containing conjugated particles selected from the group consisting of triphenyl diamine derivatives, quinacridone and combinations thereof, or a liquid conjugated monomer containing said conjugated particles.
A method for making conjugated polymer layers in a vacuum chamber, comprising:
- (a) flash evaporating a conjugated material forming an evaporate;
- (b) passing said evaporate to a glow discharge electrode creating a glow discharge conjugated monomer plasma from the evaporate;
- and
- (c) condensing said glow discharge conjugated plasma on a substrate as a condensed conjugated monomer and crosslinking said condensed conjugated monomer thereon without a separate curing step, said crosslinking resulting from radicals created in said glow discharge plasma wherein said conjugated material is selected from the liquid conjugated monomer phenylacetylene, or the liquid conjugated monomer phenylacetylene containing conjugated particles.
A method for making conjugated polymer layers in a vacuum chamber, comprising:
- (a) flash evaporating a conjugated material forming an evaporate;
- (b) passing said evaporate to a glow discharge electrode creating a glow discharge conjugated monomer plasma from the evaporate;
- and
- (c) condensing said glow discharge conjugated plasma on a substrate as a condensed conjugated monomer and crosslinking said condensed conjugated monomer thereon without a separate curing step, said crosslinking resulting from radicals created in said glow discharge plasma wherein said conjugated material is selected from a liquid unconjugated monomer containing conjugated particles selected from the group consisting of triphenyl diamine derivatives, quinacridone and combinations thereof, or a liquid conjugated monomer containing said conjugated particles.
Dependencies are inferred from the claim text.