Plasma enhanced chemical deposition for high and/or low index of refraction polymers
AssigneeBattelle Memorial Institute
InventorJohn D. Affinito
Life of this patent
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Abstract
The method of the present invention for making a polymer layer with a selected index of refraction has the steps of (a) flash evaporating a monomer material capable of cross linking into a polymer with the selected index of refraction, forming an evaporate; (b) passing the evaporate to a glow discharge electrode creating a glow discharge monomer plasma from the evaporate; and (c) cryocondensing the glow discharge monomer plasma on a substrate and crosslinking the glow discharge monomer plasma thereon, wherein the crosslinking results from radicals created in the glow discharge monomer plasma and achieves self curing and forms a polymer having the selected index of refraction.
Claims23
A method of making a polymer layer having a selected index of refraction, the method using plasma enhanced chemical vapor deposition onto a substrate in a vacuum environment, comprising the steps of:
- (a) providing a monomer cross linkable into a polymer with said selected index of refraction;
- (b) making an evaporate by receiving a plurality of monomer particles as a spray into a flash evaporation housing, evaporating said monomer on an evaporation surface, and discharging said evaporate through an evaporate outlet;
- (c) making a monomer plasma from said evaporate by passing said evaporate proximate a glow discharge electrode and creating a glow discharge;
- and
- (d) cryocondensing said monomer plasma onto said substrate and crosslinking said monomer plasma thereon, forming said polymer layer having said selected index of refraction.
A method for making a polymer layer of a polymer with a selected index of refraction in a vacuum chamber, comprising the steps of:
- (a) flash evaporating a monomer material capable of cross linking into said polymer with said selected index of refraction, forming an evaporate;
- (b) passing said evaporate to a glow discharge electrode creating a glow discharge monomer plasma from said evaporate;
- (c) cryocondensing said glow discharge monomer plasma on a substrate and crosslinking said glow discharge plasma thereon, said crosslinking resulting from radicals created in said glow discharge plasma for self curing and forming said polymer layer having said selected index of refraction.
Dependencies are inferred from the claim text.