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US 6,207,117 B1Granted
Charged particle beam apparatus and gas supply and exhaustion method employed in the apparatus
AssigneeKabushiki Kaisha Toshiba
InventorsJun Takamatsu, Munehiro Ogasawara
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Abstract
An adsorption plate formed of a carrier and a precious metal catalyst carried by the carrier is provided at that portion of at least one of a beam column and a sample chamber incorporated in a charged-particle beam apparatus, in which carbon compounds may be generated. Further, a precious metal catalyst is provided on each deflector electrode contained in the beam column.
Claims23
A charged-particle beam apparatus comprising:
- a beam column having a beam source section which contains a beam source for generating a charged-particle beam, and a deflector electrode section for deflecting the beam generated from the beam source;
- a chamber connected to the beam column;
- and
- a catalyst member provided in an area of the at least one of the beam column and the sample chamber, in which carbon compounds are generated, the catalytic material accelerating decomposition of the carbon compounds by oxidation.
1 more element
A charged-particle beam apparatus including:
- a beam column having a beam source section which contains a beam source for generating a charged-particle beam, and a deflector electrode section for deflecting the beam generated from the beam source;
- and a sample chamber connected to the beam column and containing a sample to be radiated with the beam deflected by the deflector electrode section of the beam column;
- wherein the deflector electrode section has a catalyst member consisting of a carrier and a precious metal carried by the carrier.
Dependencies are inferred from the claim text.