Magnetron with cooling system for substrate processing system

A magnetron for use in a process chamber, comprising:

• a) an upper first surface;
• b) a lower second surface;
• c) at least two or more magnet pieces disposed between the upper first surface and the lower second surface;
• d) a shaft coupled to the upper first surface and the lower second surface for receiving a rotational motion;
• and
• e) at least one deflection member disposed between the upper first surface and the lower second surface and between at least two magnet pieces.

A vacuum processing system, comprising:

• a) a transfer chamber;
• b) a process chamber cooperatively engaged with the transfer chamber, the process chamber having a cooling system, comprising:
• i) a cooling cavity;
• ii) a rotating member, capable of a rotational motion, disposed within the cooling cavity, the rotating member having an upper first surface, a lower second surface, and at least two or more magnet pieces;
• iii) a motor device for imparting a rotational motion to the rotating member;
• and
• iv) at least one deflection member disposed between the upper first surface and the lower second surface and between at least two magnet pieces.

A method for cooling a rotating member of a process chamber, comprising:

• a) imparting a rotational motion to the rotating member;
• b) providing a cooling fluid around an outer surface of the rotating member;
• and
• c) using a deflection member disposed between an outer perimeter of the rotating member and an interior portion of the rotating member and between at least two magnet pieces to deflect at least a portion of the cooling fluid from an outer perimeter of the rotating member to an interior portion of the rotating member between an upper first surface and a lower second surface of the rotating member.

A process chamber, comprising:

• a) a cooling cavity;
• b) a rotating member disposed at least partially in the cooling cavity, having an upper first surface and a lower second surface;
• c) a motor coupled to the rotating member;
• d) at least one deflection member disposed between the upper first surface and the lower second surface;
• and
• e) at least one deflection member disposed between an outer perimeter of the rotating member and an interior portion of the rotating member.

A process chamber, comprising:

• a) a cooling cavity;
• b) a rotating member disposed at least partially in the cooling cavity, having an upper first surface and a lower second surface;
• c) a motor coupled to the rotating member;
• and
• d) at least one deflection member comprising an end that forms a leading edge disposed in a forward rotational direction adjacent an outer perimeter of the rotating member, wherein the deflection member is disposed between the upper first surface and the lower second surface.

A magnetron for use in a process chamber, comprising:

• a) an upper first surface;
• b) a lower second surface;
• c) a rotational axis for receiving a rotational motion;
• and
• d) at least one deflection member disposed between the upper first surface and the lower second surface and radially inward from an outer perimeter of the magnetron.

A magnetron for use in a process chamber, comprising:

• a) an upper first surface;
• b) a lower second surface;
• c) a rotational axis for receiving a rotational motion;
• and
• d) at least one deflection member comprising an end that forms a leading edge disposed in a forward rotational direction adjacent an outer perimeter of the rotating member, wherein the deflection member is disposed between the upper first surface and the lower second surface.

A vacuum processing system, comprising:

• a) a process chamber having a cooling cavity;
• b) a transfer chamber cooperatively engaged with the process chamber;
• c) a rotating member, capable of a rotational motion, disposed within the cooling cavity, the rotating member having an upper first surface and a lower second surface;
• d) a motor device for imparting a rotational motion to the rotating member;
• e) at least one deflection member disposed between the upper first surface and the lower second surface;
• and
• f) at least one deflection member disposed between an outer perimeter of the rotating member and an interior portion of the rotating member.

A vacuum processing system, comprising:

• a) a process chamber having a cooling cavity;
• b) a transfer chamber cooperatively engaged with the process chamber;
• c) a rotating member, capable of a rotational motion, disposed within the cooling cavity, the rotating member having an upper first surface and a lower second surface;
• d) a motor device for imparting a rotational motion to the rotating member;
• and
• e) at least one deflection member comprising an end that forms a leading edge disposed in a forward rotational direction adjacent an outer perimeter of the rotating member, wherein the deflection member is disposed between the upper first surface and the lower second surface.

A cooling system coupled to a process chamber, comprising:

• a) a cooling cavity;
• b) a rotating member disposed at least partially in the cooling cavity, having an upper first surface, a lower second surface, and at least one magnet disposed between the upper first surface and the lower second surface;
• c) a motor coupled to the rotating member;
• and
• d) at least one deflection member disposed between the upper first surface and the lower second surface, wherein the deflection member comprises at least one curved portion.