Integrated flow controller module

A method for preparing an integrated flow controller module comprising the steps of:

• preparing a substrate;
• etching said substrate to form a fluid inlet, a fluid outlet and at least one fluid channel section;
• forming a middle layer on said substrate;
• etching said middle layer to form at least a fluid channel section, at least one fluid stopper and a mesa;
• forming an elastic wall layer on said middle layer;
• fixing a number of electrodes on said elastic wall layer at positions including a position adjacent to said mesa;
• fixing resistors of the same number as the number of said electrodes on said elastic wall layer at positions fixed with said resistors before said resistors are fixed, such that said electrodes overlap at least partially with said resistors, respectively;
• forming an upper layer on said elastic wall layer, wherein said upper layer is provided with cavities of the same number as the number of said electrodes;
• and
• providing said cavities with electrodes inside said cavities opposite to positions corresponding to said electrodes on said elastic wall layer.