Vacuum coupling system

A vacuum coupling system comprising:

• a valve mechanism attached to a vacuum suction mechanism of a wafer holder attracting a semiconductor wafer and a contactor by vacuum suction so that the wafer holder, a semiconductor wafer, and the contactor form an integral structure;
• a vacuum coupling removably attached to the valve mechanism to connect the vacuum suction mechanism to a vacuum exhaust device;
• a movement drive mechanism for moving the vacuum coupling relatively to the valve mechanism so that the vacuum coupling is attached to and detached from the valve mechanism;
• and
• a vacuum coupling positioning mechanism for aligning the vacuum coupling with the valve mechanism on a plane to allow the movement drive mechanism to move the vacuum coupling relatively to the valve mechanism,
• the vacuum coupling positioning mechanism including a guide member attached to the wafer holder, a positioning member attached to the movement drive mechanism and guided by the guide member, and a support mechanism for the movement drive mechanism, the support mechanism automatically regulating the position of the movement drive mechanism in response to the movement of the positioning member guided by the guide member, thereby adjusting the position of the vacuum coupling with the valve mechanism.

A vacuum coupling system comprising:

• a valve mechanism attached to a vacuum suction mechanism of a wafer holder attracting a semiconductor wafer and a contactor by vacuum suction so that the wafer holder, the semiconductor wafer, and the contactor form an integral structure;
• a vacuum coupling removably attached to the valve mechanism to connect the vacuum suction mechanism to a vacuum exhaust device;
• a movement drive mechanism for moving the vacuum coupling relatively to the valve mechanism so that the vacuum coupling is attached to and detached from the valve mechanism;
• and
• a vacuum coupling positioning mechanism for aligning the vacuum coupling with the valve mechanism along one plane and another plane perpendicular thereto to allow the movement drive mechanism to move the vacuum coupling relatively to the valve mechanism,
• the vacuum coupling positioning mechanism including a guide member attached to the wafer holder, a positioning member attached to the movement drive mechanism and guided by the guide member, and a support mechanism for the movement drive mechanism, the support mechanism automatically regulating the position of the movement drive mechanism in response to the movement of the positioning member guided by the guide member, thereby adjusting the position of the vacuum coupling with the valve mechanism.