Backside contamination inspection device
AssigneeKLA-Tencor Corporation
InventorRodney G Smedt
Life of this patent
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Abstract
A system for simultaneously inspecting the frontsides and backsides of semiconductor wafers for defects is disclosed. The system rotates the semiconductor wafer while the frontside and backside surfaces are generally simultaneously optically scanned for defects. Rotation is induced by providing contact between the beveled edges of the semiconductor wafer and roller bearings rotationally driven by a motor. The wafer is supported in a tilted or semi-upright orientation such that support is provided by gravity. This tilted supporting orientation permits both the frontside and the backside of the wafer to be viewed simultaneously by a frontside inspection device and a backside inspection device.
Claims15
A device for inspecting a semiconductor wafer, said semiconductor wafer comprising a back side, comprising:
- a surface for supporting said semiconductor wafer;
- and
- an optical device positioned proximate the back side of said semiconductor wafer for illuminating and viewing said back side of said semiconductor wafer;
- wherein said semiconductor wafer further comprises a front side, said device further comprising an optical device for illuminating the front side of said wafer.
An apparatus for inspecting a specimen, said specimen comprising a front side and a back side, said apparatus comprising:
- a surface for supporting said specimen;
- a plurality of reorientation elements for altering the orientation of said specimen;
- a backside optical device for illuminating and viewing the back side of said specimen;
- a front side optical device for illuminating and viewing the front side of said specimen;
- and
- a support system integrally formed within said surface for supporting said specimen thereon.
A method for inspecting a specimen, comprising the steps of:
- floatably supporting said specimen on a surface;
- rotating said specimen;
- and
- inspecting a front side of said specimen while simultaneously inspecting a back side of said specimen;
- wherein said inspecting step comprises illuminating the front side of said specimen while simultaneously illuminating the back side of said specimen.
Dependencies are inferred from the claim text.