Coaxial resonator microwave plasma generator
AssigneeRalf Spitzl
InventorsRalf Spitzl, Benedikt Aschermann
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Abstract
In a device for the production of powerful microwave plasmas, the resonator is designed as a coaxial resonator with inner and outer conductors. The microwaves are coupled into the plasma chamber via the boundaries of the coaxial resonator.
Claims9
A device for the production of microwave plasmas, comprising a microwave generator, a feeding resonator with coupling points, a plasma chamber, and a coaxial resonator, wherein outer and inner boundaries of said feeding resonator comprise outer and inner conductors of said coaxial resonator.
A device according to one or the preceding claims, wherein the coupling points for coupling the microwaves into or out of the resonator are arranged in or on the walls of the coaxial resonator, or in or on a common wall of the chamber and resonator.
Dependencies are inferred from the claim text.