Back illuminated photodetector and method of fabricating the same

A method of fabricating a back-illuminated photodetector having, on a semiconductor substrate, an imaging portion for generating charges in response to incidence of an electromagnetic wave or charged particles transmitted through said semiconductor substrate and outputting the charges, comprising:

• forming said imaging portion on a first surface of said semiconductor substrate consisting essentially of silicon;
• applying one of insulating inorganic materials and organic resins to said entire first surface having said imaging portion to form a coating film having a planar surface;
• depositing an oxidizable conductive film consisting essentially of one of a semiconductor and a metal on said coating film;
• anodically bonding, a surface of said conductive film to a glass substrate;
• and
• grinding said semiconductor substrate from a second surface opposite to said first surface using mechanical polishing, chemical etching, or both of them to thin said semiconductor substrate.