US 6,204,129 B1Granted

Method for producing a high-voltage and low-voltage MOS transistor with salicide structure

AssigneeUnited Microelectronics Corp.

InventorsChing-Chun Hwang, Wei-Chung Chen, Chien-Kuo Yang

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Abstract

A method for producing self-aligned silicidation, substantially facilitating the integration of the high-voltage and low-voltage MOS device, is disclosed. The method includes providing, the present invention provides a integration of high-voltage and low-voltage MOS transistor, which self-aligned silicidation process. A substrate is provided incorporating a device, wherein the device is defined high-voltage MOS region and low-voltage MOS region. Sequentially, a plurality of field oxides are formed on the substrate, one of the field oxide is spaced from another of the field oxide by a MOS region. Moreover, a polysilicon layer is formed over said high-voltage MOS region and low-voltage MOS region, and a first dielectric layer is deposited above the polysilicon layer of the high-voltage MOS region and low-voltage MOS region. Consequently, a first photoresist layer is formed over the first dielectric layer, wherein defining and etching the first photoresist layer to form gates of high-voltage MOS and low-voltage MOS. Then, using said second photoresist layer as a mask above low-voltage MOS region, firstly implanting the substrate of the high-voltage MOS region to form conductivity-type grade therein, and then the second photoresist layer of low-voltage MOS region is removed. Moreover, spacers are formed on sidewall of said gates of high-voltage MOS and low-voltage MOS, and then a second dielectric layer is formed on the substrate of high-voltage and low-voltage MOS.

Claims22

Dependent claims

A method for forming a semiconductor device, comprising:

providing a substrate on which a high-voltage MOS and a low-voltage MOS transistor region are defined;
forming a plurality of field oxides on said substrate, one of said field oxides being spaced from another of said field oxide by one of the MOS transistor regions;
depositing a polysilicon layer over said high-voltage MOS and low-voltage MOS transistor regions;
depositing a first dielectric layer over said polysilicon layer of said high-voltage MOS and low-voltage MOS transistor regions;
forming a first photoresist layer over said first dielectric layer, wherein said first photoresist layer is defined and etched to form gates of high-voltage MOS and low-voltage MOS transistor;
using a second photoresist layer as a mask above low-voltage MOS transistor regions, and firstly implanting the substrate of said high-voltage MOS transistor region to form first conductivity-type grade therein;
removing said second photoresist layer of the low-voltage MOS transistor region;
forming a plurality of spacers on sidewall of said gates of the high-voltage MOS and low-voltage MOS transistor;
forming a second dielectric layer on said substrate of the high-voltage MOS and the low-voltage MOS transistor;
forming a third photoresist layer having a first pattern on said the high-voltage MOS transistor and a second pattern on said low-voltage MOS transistor, wherein etching a portion of said first dielectric layer and said second dielectric layer is performed until top surface of said polysilicon layer and said grade is exposed by using said third photoresist layer as a hard mask;
implanting second conductivity type ions inside said grade of high-voltage MOS transistor and inside the substrate of the low-voltage MOS transistor using said third photoresist layer as a mask;
removing the third photoresist layer;
and
sputtering said exposed polysilicon layer and said grade to form silicide region.

11 more elements

A method for forming a semiconductor device, comprising:

providing a silicon substrate on which high-voltage MOS and low-voltage MOS transistor region are defined;
forming a plurality of field oxides on said silicon substrate, one of said field oxides being spaced from another of said field oxide by one of the MOS transistor regions;
depositing a polysilicon layer over said high-voltage MOS and low-voltage MOS transistor regions;
depositing a silicon nitride layer over said polysilicon layer of said high-voltage MOS and low-voltage MOS transistor regions;
forming a first photoresist layer over said silicon nitride layer, wherein said first photoresist layer is defined and etched to form gates of high-voltage MOS and low-voltage MOS transistor;
using a second photoresist layer as a hard mask above low-voltage MOS transistor region, and firstly implanting the substrate of said high-voltage MOS transistor region to form N-type grade therein;
removing said second photoresist layer of the low-voltage MOS transistor region;
forming a plurality of spacers on sidewall of said gates of said high-voltage MOS and said low-voltage MOS transistor;
forming a silicon dioxide layer on said silicon substrate of said high-voltage MOS and said low-voltage MOS transistor by thermal oxidation method;
forming a third photoresist layer having a first pattern on said high-voltage MOS transistor and a second pattern on said low-voltage MOS transistor, wherein etching a portion of said silicon nitride layer and said silicon dioxide layer is performed until top surface of said polysilicon layer and said N-type grade is exposed by using said third photoresist layer as a hard mask;
implanting N+ type ions into said grade of high-voltage MOS and into the substrate of the low-voltage MOS transistor to form source/drain of high-voltage MOS and low-voltage MOS transistor by using said third photoresist layer as a mask;
removing the third photoresist layer;
sputtering said exposed polysilicon layer and source/drain of high-voltage MOS and low-voltage MOS transistor to form silicide region, and
depositing an inter-layer dielectric above the substrate, wherein said inter-layer dielectric is etched to form a contact via therein.

11 more elements

Dependencies are inferred from the claim text.

Facts

Application: 09/425,606Filed 22 Oct 1999
Granted: 20 Mar 2001
Term ends: Not estimatedThe source records don’t support an estimate.

Classification5 codes

H10D 84/038
Using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology: using silicon technology, e.g. SiGe
H10D 84/013
The components including insulated gates, e.g. IGFETs: manufacturing their source or drain regions, e.g. silicided source or drain regions
H10D 84/0137
Manufacturing their gate conductors: the gate conductors being silicided
H10D 84/0142
Manufacturing their gate conductors: the gate conductors having different shapes or dimensions