Method for manufacturing a substrate of a liquid crystal display device
AssigneeLG LCD Inc.
InventorsWoong Kwon Kim, Jeong Hyun Kim, Jae Yong Park
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AssigneeLG LCD Inc.
InventorsWoong Kwon Kim, Jeong Hyun Kim, Jae Yong Park
Estimating the term…
A method of manufacturing a substrate of an LCD prevents defective patterning of pixel electrodes and improves an aperture ratio of pixels by simplifying the steps of manufacturing a substrate of an LCD. A protection layer is formed on a substrate and the protection layer includes a light developable organic(BCB) layer which is patterned directly by exposing using a mask instead of patterning with a photo resist. The portion of the light developable organic layer remaining on the bottom part of contact holes after patterning is etched using a gate insulating layer. The etching process using the gate insulating layer is performed partially in order to expose the surface of the gate pad by using a plasma gas having about 85% CF4 and about 15% O2.
A method for manufacturing an LCD, comprising the steps of:
A method for manufacturing an LCD, comprising the steps of:
A method for manufacturing an LCD, comprising the steps of:
A method for manufacturing an LCD, comprising the steps of:
Dependencies are inferred from the claim text.