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OwnerThomas K. Dougherty, O. Glenn Ramer +1inventors
InventorsThomas K. Dougherty, O. Glenn Ramer, Venita L. Dyer
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A hydrogen getter comprising a thin film having a layer of inert material, and a hydrogen reactive material disposed in or attached to the layer of inert material. The hydrogen reactive material may comprise palladium oxide powder, and the layer of inert material may comprise an epoxy resin. Various forms of the hydrogen reactive material may be used including porous composite, or a solid composite comprising a powder coated organic thin film, for example. An alternative gettering system that is operative in an oxygen environment uses a thin film of hydrogen reactive material that catalyzes the reaction of hydrogen and oxygen to form water. Improved sealed microelectronic packages are also disclosed along with methods of fabricating same.
A sealed microelectronic package having a sealed enclosure and a hydrogen gettering system for removing hydrogen from sealed microelectronic packages backfilled with an inert gas, comprising:
Dependencies are inferred from the claim text.