Control of the surface roughness of magnetic disk
AssigneeInternational Business Machines Corporation
InventorsEdgar Frohnmeyer, Klaus Rij, Stephan Spinzig, Irene Springer
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Abstract
A process is described for texturing the surface of magnetic disks which permits control of the micro-roughnesses of the surface through selective oxidation of certain areas of the surface of the substrate used for magnetic disks. For example, islands of oxidation can be produced by rinsing the substrates in oxygen containing water at an elevated temperature. The islands provide preferential nucleation sites for thin film metal deposition, e.g. a chromium underlayer, to form nodules. These nodules affect the micro-topography of the final magnetic disk.
Claims18
Method for producing a magnetic disk, comprising the steps of:
- adjusting a dissolved oxygen content of a rinsing liquid to a selected percentage range;
- rinsing a substrate with the rinsing liquid to allow the dissolved oxygen to oxidize portions of the substrate surface to form oxide islands;
- sputtering a layer of metal atoms onto a surface of the substrate magnetic disk, and
- sputtering one or more thin films onto the surface of the substrate including a magnetic thin film.
A method of producing magnetic disks comprising the steps of:
- oxidizing portions of a surface of a substrate by rinsing the substrate with a liquid containing a selected amount of dissolved oxygen, the selected amount of dissolved oxygen being chosen to form oxide islands while allowing portions of the surface to remain unoxidized;
- sputtering a metal onto the surface forming nodules at oxide islands;
- and
- sputtering one or more thin film layers including a magnetic layer.
Dependencies are inferred from the claim text.