Method and apparatus for controlling the quality of a photoresist stripper bath
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYun-Hung Shen, Pin-Yin Shin, Shih-Chun Huang, Yu-Lun Lin
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Abstract
A photoresist stripper bath includes a filter in a re-circulation line for filtering residual photoresist materials from said bath. The quality of the stripper and the concentration of the photoresist materials are sensed by passing infrared light transversely through the re-circulating line, detecting the intensity of the light passed through the line and comparing the detected level with a threshold value related to the concentration of the photoresist materials in said stripper.
Claims4
Apparatus for controlling the quality of a bath of photoresist stripper, wherein said stripper quality is degraded by the accumulation of photoresist materials in said bath, comprising:
- a tank for containing said bath, said tank having first and second sections divided from each other;
- a first filter for filtering photoresist materials accumulated in said bath having a first particle size;
- a second filter for filtering photoresist materials accumulated in said bath having a second particle size larger than said first size;
- first and second feed lines respectively delivering stripper from said first section of said tank to said first and second filters;
- a recirculation line coupling said first and second filters in series with each other and for drawing filtered stripper from said first filter through said second filter, and from said second filter to said second section of said tank;
- a light source on one side of said second feed line and oriented to direct light through said second feed line;
- a sensor positioned on the opposite side of said second feed line for sensing light passing through said second feed line and originating from said light source, the magnitude of said light sensed by said sensor representing the concentration of said photoresist materials in said bath.
Dependencies are inferred from the claim text.