Conveying unit and substrate processing unit

A conveyor unit, comprising:

• a cassette stock portion that accommodates a cassette, the cassette horizontally accommodates a plurality of raw substrates;
• a conveyor mechanism that horizontally loads and unloads each of the raw substrates to and from the cassette;
• a memory that stores the relative relation of loading/unloading positions of raw materials;
• and
• a controller that sets the loading/unloading position of at least one of the substrates and determines the relative position of any remaining substrates in the cassette;
• wherein the controller issues instructions to said conveyor to convey each of the raw substrates or controlling a vertical traveling amount of the cassette corresponding to the loading/unloading position of the at least one substrate and the relative position any remaining substrates.

A conveyor unit, comprising:

• a cassette stock portion that accommodates a cassette, the cassette horizontally accommodating a plurality of raw substrates;
• a conveyor mechanism for horizontally loading and unloading each of the raw substrates to and from the cassette;
• a calculator that calculates a flexure amount of each of the raw substrates accommodated in the cassette;
• and
• a controller that determines the loading/unloading position of each of the raw substrates corresponding to calculated results from said calculator;
• wherein
• the controller issues instructions to said conveyor to convey each of the raw substrates or controlling a vertical traveling amount of the cassette corresponding to the determined results of said controller.

A substrate, processor, comprising:

• a plurality of processors that set vertical positions of raw substrates and process the raw substrates;
• a cassette stock portion the accommodates a cassette, the cassette horizontally accommodating a plurality of raw substrate;
• a conveyor mechanism that horizontally loads and unloads each of the raw substrates to and from the cassette;
• a processor conveyer that receives each of the raw substrates through said conveyor mechanism and conveys each of the raw substrates to each of the plurality of processors;
• a detector that determines a thickness and/or a flexure amount of each of the raw substrates accommodated in the cassette and detects the number and positions of the raw substrates accommodated in the cassette;
• and
• a controller that controls at least one of a loading/unloading position of each of the raw substrates to and from the cassette by said conveyor mechanism, the loading/unloading position of each of the raw substrates to each of the processors by the processor conveyor, a processing position of each of the raw substrates processed in each of the processors, a process time of each of the raw substrates processed in each of the processors, a gas exhaust amount in each of the processors in which each of the raw substrates is placed, a spray amount of a processing solution supplied to each of the raw substrates, and atmospheric gas reacted with each of the raw substrates corresponding to detected results of said detector so as to set and control a vertical direction of each of the raw substrates and/or control processing conditions of each of the raw substrates.