Positioning apparatus for substrates to be processed
AssigneeTokyo Electron Limited
InventorMasahiro Miyashita
Life of this patent
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Abstract
An apparatus is provided with a plurality of stages of mounting bases on each of which is disposed upwardly orientated, narrow tapered pins around the periphery of a semiconductor wafer, and a plurality of stages of turntables, one for each of the mounting bases, with the mounting bases being capable of moving independently of the turntables. When a wafer is transferred from a transporter arm to the tapered pins, the peripheral edge of the wafer comes into contact with the inner peripheral surfaces of the tapered pins and the wafer is centered thereby. The turntable then picks up the wafer and aligns the orientation thereof. This makes it possible to position the centers of a plurality of wafers and position the orientations thereof in a simple manner.
Claims5
An apparatus for positioning substrates to be processed, comprising:
- a substrate cassette for horizontally supporting therein a plurality of substrates at intervals in a vertical direction without regard for whether the center of each substrate is aligned with the center of any other substrate, said substrate cassette having side walls defining a plurality of side apertures in a shape which allows outer peripheral edges of the substrates supported in said cassette to be exposed outside the cassette;
- and
- pushing mechanisms disposed outside said substrate cassette and provided to move toward and away from said side apertures, each of said pushing mechanisms having a pair of vertically and parallelly extending rotatable rollers having a vertical length engageable with the exposed outer peripheral edges of all of the substrates in the cassette to press and position the substrates whereby the center of each substrate comes into alignment with the center of each other substrate in said cassette to define a common vertical axis through the substrates when the pushing mechanism moves to one of said apertures,
- wherein said pushing mechanisms are provided on opposite sides of the substrate cassette, respectively, to move toward and away from each other.
Dependencies are inferred from the claim text.