Flow, tactile and orientation sensors using deformable microelectrical mechanical sensors

Abstract

A microelectric flow sensor including a deformable mechanical element is disclosed. The sensor includes a beam element mounted to a substrate. The beam element is anchored to the substrate on a first end, and deformed to a position normal to the surface of the substrate. An electrode is positioned on the substrate below a portion of the beam, such that when the beam is deflected, an electrical connection is established between the beam and the electrode. An alternate flow sensor includes a sensing beam surrounded by at least two cantilever beams which act as switches. The sensing beam is defined with two mechanically weak points which allow the sensing beam to be mechanically deformed to a new position approximately perpendicular to the cantilever beams and the top surface of the substrate. The substrate also includes electrodes which are positioned underneath the ends of the cantilever beams. With the sensing beam perpendicular to the surface, forces applied to the sensing beam will cause the beam to deflect. Because the cantilever beams are mechanically connected to the sensing beam the cantilever beams are bent towards a substrate upon deflection of the sensing beam. The flow sensor may be configured to function as a tilt sensor by attaching a weight proximate the end of the sensing beam. The flow sensor can be further modified to perform in harsh environments by including a diaphragm surrounding the cantilever beams and electrodes, with the sensing beam extending therethrough.

Dependencies are inferred from the claim text.