Anti-vibration apparatus and exposure apparatus

An anti-vibration apparatus comprising:

• an anti-vibration bed held horizontally through at least three pneumatic vibration-isolating pads;
• a plurality of actuators that drive said anti-vibration bed vertically at different positions, said actuator comprising a magnetic member and a coil member and generating force by interacting current flowing in said coil member and a magnetic field of said magnetic member;
• a displacement sensor that detects a displacement of said anti-vibration bed;
• a vibration sensor that detects vibrations of said anti-vibration bed;
• a first control system that controls said force generated by each of said actuators and removes high-frequency components of the vibration of said anti-vibration bed on a basis of at least one of an output of said displacement sensor and an output of said vibration sensor;
• a second control system having an air controller for controlling a flow rate of air supplied to each of said vibration-isolating pads, thereby correcting an inclination of said anti-vibration bed and removing low-frequency components of the vibration of said anti-vibration bed;
• and
• a buffer tank provided between each of said vibration-isolating pads and said air controller.

An exposure apparatus comprising:

• an anti-vibration bed held horizontally through at least three pneumatic vibration-isolating pads;
• an exposure system disposed on said anti-vibration bed to transfer a pattern on a mask onto a substrate;
• a plurality of actuators that drive said anti-vibration bed vertically at different positions, said actuator comprising a magnetic member and a coil member and generating force by interacting current flowing in said coil member and a magnetic field of said magnetic member;
• a displacement sensor that detects a displacement of said anti-vibration bed;
• a vibration sensor that detects vibrations of said anti-vibration bed;
• a first control system that controls said force generated by each of said actuators and removes high-frequency components of the vibration of said anti-vibration bed on a basis of at least one of an output of said displacement sensor and an output of said vibration sensor;
• and
• a second control system that controls a flow rate of air supplied to said vibration-isolating pads according to an amount of inclination of said anti-vibration bed and removes low-frequency components of the vibration of said anti-vibration bed, said inclination being caused by a shift of a center of gravity of said exposure system.

An exposure apparatus comprising:

• an anti-vibration bed held substantially horizontally through a pneumatic vibration-isolating pad;
• a plurality of actuators that drive said anti-vibration bed vertically at different positions, said actuator comprising a magnetic member and a coil member and generating force by interacting current flowing in said coil member and a magnetic field of said magnetic member;
• a stage that holds a substrate onto which a pattern on a mask is to be transferred, said stage being movable over said anti-vibration bed, with said substrate held thereon;
• and
• a control system that controls said force generated by each of said actuators and a flow rate of air supplied to said vibration-isolating pad according to a position of said stage, said actuator removing high-frequency components of the vibration of said anti-vibration bed and said vibration-isolating pads removing low-frequency components of the vibration of said anti-vibration bed.

An anti-vibration apparatus comprising:

• an anti-vibration bed held horizontally through at least three pneumatic vibration-isolating pads;
• a plurality of actuators that drive said anti-vibration bed vertically at different positions;
• a displacement sensor that detects a displacement of said anti-vibration bed;
• a vibration sensor that detects vibrations of said anti-vibration bed;
• a first control system that controls each of said actuators to suppress the vibrations of said anti-vibration bed on a basis of outputs of said displacement sensor and vibration sensor;
• a second control system that controls a flow rate of air supplied to said vibration-isolating pads according to an amount of inclination of said anti-vibration bed;
• and
• a control circuit that maintains, at a constant value, one of a thrust to be generated from each of said actuators and an electric current flowing through each of said actuators when an inclination of said anti-vibration bed is corrected and when the vibrations of said anti-vibration bed are suppressed.

An anti-vibration apparatus comprising:

• an anti-vibration bed held horizontally through at least three pneumatic vibration-isolating pads;
• a plurality of actuators that drive said anti-vibration bed vertically at different positions;
• a displacement sensor that detects a displacement of said anti-vibration bed;
• a vibration sensor that detects vibrations of said anti-vibration bed;
• a first control system that controls each of said actuators to suppress the vibrations of said anti-vibration bed on a basis of outputs of said displacement sensor and vibration sensor;
• a second control system having an air controller for controlling a flow rate of air supplied to each of said vibration-isolating pads, thereby correcting an inclination of said anti-vibration bed;
• and
• a buffer tank provided between each of said vibration-isolating pads and said air controller;
• wherein said air controller has an air supply-side circuit and an air discharge-side circuit, said air supply-side circuit and air discharge-side circuit each having;
• an orifice with a very small diameter which is disposed in an air passage;
• a regulator that sets a pressure in said air passage;
• and
• a solenoid valve that opens and closes said air passage.