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US 6,202,292 B1Granted
Apparatus for removing carrier film from a semiconductor die
AssigneeMicron Technology, Inc.
InventorsWarren M. Farnworth, Rockwell Smith
Life of this patent
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AssigneeMicron Technology, Inc.
InventorsWarren M. Farnworth, Rockwell Smith
Estimating the term…
An apparatus which reduces the surface area with which a carrier film adheres to a die, including a plate member including laterally-spaced supports. Preferably, the apparatus also includes a vacuum source operatively connected to the plate member. Upon placement of a carrier film having an array of semiconductor dice adhered thereto onto the plate member, the dice are proximate the supports. The vacuum pulls air from the spaces between the supports, which partially releases the carrier film from the bottom surface of at least some of the dice. The apparatus may also include a die removal mechanism such as a vacuum collet type die pick-up mechanism, an extendable member die plunge-up mechanism, or a combination thereof. The present invention also includes a method for reducing the surface area with which a carrier film adheres to a die to facilitate removal thereof.
A system for releasing at least a portion of a carrier film from at least one selected semiconductor die, comprising:
An apparatus for releasing at least a portion of a carrier film from at least one semiconductor die adhered thereto, comprising:
An apparatus for releasing at least a portion of a carrier film from at least one semiconductor die adhered thereto, comprising:
Dependencies are inferred from the claim text.