Combination of getter materials and device for containing the same
AssigneeSaes Getters S.P.A.
InventorsPaolo Manini, Claudio Boffito
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Abstract
A combination of getter materials particularly suitable to maintain vacuum in devices which cannot be heated at temperatures higher than about 200° C. The getter comprises: a mixture MO/Pd between an oxide of a transition metal MO chosen among cobalt oxide, copper oxide or their combinations and metallic palladium, wherein the latter is present up to about 2% by weight; and a moisture sorbing material. In some applications it is possible to add to this combination a barium- and lithium-based alloy, preferably BaLi4. Getter devices for containing such a combination are also described.
Claims6
A getter composition comprising:
- a cobalt oxide (Co3O4), wherein the cobalt is present at the same time under the oxidation state II and oxidation state III, mixed with palladium forming a mixture, wherein palladium is approximately 2% wt/vt of said mixture;
- said mixture combined with a moisture sorbing material selected from the group of either calcium oxide, strontium oxide, barium oxide or phosphorous oxide, having a H2O vapor pressure lower than 1 Pa at room temperature and a particle size between 50 and 500 μm;
- and
- at least one sorbed gas compound sorbed by said mixture at a temperature of less than 150° C., the sorbed gas compound being selected from the group consisting of hydrocarbons, halogenated hydrocarbons, and partially halogenated hydrocarbons.
Dependencies are inferred from the claim text.