Cleaning/buffer apparatus for use in a wafer processing device
AssigneeLam Research Corporation
InventorsMikhael Ravkin, John M. deLarios, Xiuhua Zhang, Thomas R. Gockel
Life of this patent
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Abstract
A semiconductor processing system, such as a system for buffing or scrubbing both sides of a wafer at the same time, that includes a processing box for use with chemical solutions, a positioning device to position a semiconductor substrate, or other similar semiconductor material or device, and a placement device to place a buffing pad or scrubbing brush.
Claims18
A system for processing semiconductor wafers comprising:
- a buffing station, wherein the buffing station buffs opposite sides of a wafer simultaneously;
- and
- a scrubbing station coupled to the buffing station.
A system for processing semiconductor wafers comprising:
- a buffing station;
- and
- a scrubbing station coupled to the buffing station, wherein the buffing station buffs opposite sides of a wafer simultaneously and the scrubbing station performs brush scrubbing of the opposite sides of the wafer simultaneously after buffing of the wafer by the buffing station has been completed.
A system for processing semiconductor wafers comprising:
- a buffing station;
- and
- a scrubbing station coupled to the buffing station, wherein the buffing station is configurable to be another scrubbing station.
A system for processing semiconductor wafers comprising:
- a buffing station, wherein the buffing station comprises at least one buffing element positioned by a first assembly, and wherein the first assembly positions said at least one buffing element with a pressure on a surface of a wafer in a range of approximately 0.1 to 4 psi;
- and
- a scrubbing station coupled to the buffing station, wherein the scrubbing station comprises at least one scrubbing element positioned by a second assembly, and further wherein portions of the first and second assemblies are substantially the same.
A system for processing semiconductor wafers comprising:
- a buffing station, wherein the buffing station comprises at least one buffing element positioned by a first assembly, and wherein the buffing station further comprises a wafer positioning assembly to rotate the buffing element at a speed in a range of approximately 40-120 ft/min;
- and
- a scrubbing station coupled to the buffing station, wherein the scrubbing station comprises at least one scrubbing element positioned by a second assembly, and further wherein portions of the first and second assemblies are substantially the same.
A system for processing semiconductor wafers comprising:
- a buffing station, wherein the buffing station applies at least one buffing element to a wafer with a pressure on a surface of the wafer in a range of approximately 0.1 to 4 psi while rotating the buffing element at a speed in a range of approximately 40 to 120 ft/min;
- and
- a scrubbing station coupled to the buffing station.
An improvement in a system for processing semiconductor wafers, the improvement comprising:
- an assembly configurable to apply a processing element to a semiconductor wafer at a plurality of pressures that include a first set of pressures sufficient to scrub a semiconductor wafer and a second set of pressures sufficient to buff the semiconductor wafer.
A system for processing a semiconductor wafer comprising:
- a buffing assembly comprising
- a container;
- a first pad coupled to the container to buff a first side of the wafer;
- a second pad to buff a second side of the wafer;
- a pad positioning assembly coupled to the container and the second pad to position the second pad with respect to the wafer so as to enable buffing of two sides of the wafer simultaneously by the first and second pads;
- and
- a scrubbing station coupled to the buffing station.
Dependencies are inferred from the claim text.