Rotary motion feedthrough device
AssigneeRigaku/USA, Inc.
InventorsDavid G. Mahoney, Walter Helgeland
Life of this patent
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Abstract
A rotary motion feedthrough is described for coupling rotary motion from a rotatable shaft between an atmospheric side to a vacuum side by providing a dynamic magnetic seal of ferrofluid about the shaft using a non-rotating magnetic system formed of a unitary pole piece with magnets contained in radial slots formed in an inner diameter of the pole piece opposite the shaft.
Claims20
A device for coupling rotary motion between first and second environments separated by a barrier comprising:
- a. magnets;
- b. a unitary cylindrical member having an inner diameter and an outer diameter;
- (i) slots extending radially outward from the inner diameter of the member, the slots having a sufficient width and depth to accept said magnets;
- (ii) at least one groove extending radially inward from the outer diameter of the member for accepting a static seal;
- and
- (iii) magnetic pole tips formed on the inner diameter of the member laterally adjacent to the slots and adapted to contain magnetic fluid between said tips;
- c. a rotatable shaft adapted to extend along the inner diameter of the member between the first and second environments;
- and
- d. a housing radially enclosing the member.
A device for coupling rotary motion between first and second environments separated by a barrier comprising:
- a. a housing affixed to said barrier;
- b. a rotatable shaft extending from the first environment to the second environment through the housing;
- and
- c. a non-rotatable magnet system, intermediate the ends of the shaft, forming a dynamic gas seal between the rotatable shaft and the fixed housing, the system including a unitary pole piece having an inner diameter and an outer diameter with magnets disposed in slots formed in the inner diameter with pole piece tips containing ferrofluid disposed adjacent to said slots.
A magnetic fluid sealing device comprising:
- a. a housing;
- b. an axially extending shaft rotatably mounted within said housing and wherein one end of the shaft is adapted to be disposed at a low pressure environment and another end at a high pressure environment;
- c. a tubular cylindrical unitary pole piece having an inner diameter and an outer diameter, with slots formed in the inner diameter for retaining magnets therein and pole piece tips formed in said inner diameter adjacent said slots for retaining magnetic fluid therein;
- d. at least one magnet for generating a magnetic flux which flux extends through portions of said housing, the magnet and pole piece radially encircling said shaft and forming with said magnetic fluid a magnetic fluid seal for sealing of any gaps which may exist between the shaft and the pole piece.
A method of forming a dynamic seal for a rotary shaft enclosed by a housing, the shaft having first and second ends adapted to be axially extended between a low pressure atmosphere and a higher pressure atmosphere comprising the steps of:
- a. forming a unitary pole piece;
- b. forming a magnetic seal about radial gaps in the unitary pole piece radially located between the shaft and the housing using magnetic energy;
- c. providing at least one magnet affixed to a radial slot formed in an inner diameter of the pole piece;
- and
- d. providing a ferrofluid in said gaps which is retained by said magnetic energy.
The method of assembling a dynamic seal for a rotary shaft adapted to extend between a low pressure atmosphere and a higher pressure atmosphere comprising the steps of:
- a. providing a unitary tubular cylindrical pole piece having radial slots formed in an inner diameter thereof and magnetic pole tips adjacent the slots also on an inner diameter thereof;
- b. inserting magnets in said slots;
- c. inserting said shaft through said inner diameter;
- d. mounting the shaft, pole piece and magnets on a fixed housing and coupling magnetic fluid into the pole tips.
Dependencies are inferred from the claim text.