Chemical delivery system having purge system utilizing multiple purge techniques

A method of operating a chemical delivery system for delivery of chemicals to a semiconductor process tool, comprising:

• providing at least one liquid chemical from the chemical delivery system to the semiconductor process tool;
• purging at least a portion of the chemical delivery system of gas, the liquid chemical or contaminants, the purging including the use of at least three different purging techniques each having a separate source that is separate from a chemical source container containing the liquid chemical;
• and
• changing at least one canister of the chemical delivery system, the canister containing the at least one liquid chemical.

A chemical delivery system, comprising:

• at least one canister inlet and at least one canister outlet line capable of coupling at least one chemical canister source holding a chemical;
• a plurality of manifold valves and lines;
• a first purge source inlet coupling a first purge source to the plurality of manifold valves and lines;
• a second purge source inlet coupling a second purge source to the plurality of manifold valves and lines;
• and
• a third purge source inlet coupling a third purge source to the plurality of manifold valves and lines, the first, second and third purge sources each being different types of purge sources wherein the first, second and third purge sources are separate from the at least one chemical canister source.

A chemical delivery system for delivery of low vapor pressure liquid chemicals to a semiconductor process tool, comprising:

• at least one chemical output line, the chemical output line coupled to the manifold of the chemical delivery system and operable to provide the low vapor pressure liquid chemical to the semiconductor process tool;
• at least three purge source inlet lines, the purge source inlet lines coupling at least three different purge sources to the manifold for purging the manifold for purging the manifold;
• and
• one or more refillable canisters coupled to the manifold wherein the at least three different purge sources are separate from said one or more refillable canister.