Method and apparatus for cleaning a dispense line
AssigneeMicron Technology, Inc.
InventorsBruce L. Hayes, Mark V. Peckham
Life of this patent
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AssigneeMicron Technology, Inc.
InventorsBruce L. Hayes, Mark V. Peckham
Estimating the term…
An apparatus including a dispense line, a solvent line, and a solvent vapor bath having a purge section is disclosed. The purge section of the apparatus has a cleaning member disposed therein containing at least one dispense hole corresponding to the dispense line. The purge section contains a plurality of ports to receive the dispense line and the solvent line. The solvent line is directed toward the cleaning member when the dispense line extends through the dispense hole. A method of cleaning a dispense line is also disclosed. In the method, a solvent vapor bath comprising a purge region having a cleaning member disposed therein and containing at least one dispense hole is provided. The purge region contains a plurality of ports to receive the dispense line and a solvent line, the solvent line being directed toward the cleaning member when the at least one dispense line extends through the at least one dispense hole. The method includes disposing the dispense line through one of the ports of the purge region and the dispense hole of the cleaning member, disposing a solvent dispense line through one of the ports of the purge region, and dispensing solvent from the solvent dispense line toward the cleaning member.
An apparatus for cleaning, comprising:
A method of cleaning at least one dispense line, comprising:
An apparatus for cleaning a dispense line comprising:
An apparatus for cleaning, comprising:
An apparatus for rinsing an outside surface of a dispenser with a solvent, comprising:
An apparatus for cleaning a dispense line, comprising:
A method of rinsing an outside surface of a dispenser with a solvent, comprising:
A method of cleaning a dispense line, comprising:
Dependencies are inferred from the claim text.