Silicided silicon microtips for scanning probe microscopy
AssigneeInternational Business Machines Corporation
InventorsLambert A. Doezema, Philip V. Kaszuba, Leon Moszkowicz, James M. Never, James A. Slinkman
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Abstract
A micromechanical sensor probe for a scanned-probe tool includes a silicon cantilever and a silicon tip physically attached to the cantilever. The micromechanical sensor probe has a coating of a refractory metal silicide formed at least on the tip. Titanium silicide is preferred. The probe also has a layer of refractory metal nitride formed entirely over the refractory metal silicide.
Claims16
A micromechanical sensor probe for a scanned-probe tool comprising:
- a cantilever comprising silicon;
- a tip comprising silicon and being physically attached to the cantilever;
- a coating of a refractory metal silicide formed at least on the tip of said probe;
- and
- a layer of refractory metal nitride formed entirely over the refractory metal silicide.
In a probe for testing integrated circuits which includes a support body, a probe tip positioned on the support body, and conductive means to transmit an electrical signal to and from the probe tip, the improvement comprising a silicon probe tip which has:
- a coating of a refractory metal silicide formed at least on the tip of said probe and a layer of refractory metal nitride formed entirely over the refractory metal silicide.
Dependencies are inferred from the claim text.