Parallel plate apparatus for in-situ vacuum line cleaning for substrate processing equipment

An apparatus for collecting particles exhausted from a substrate processing chamber, the apparatus comprising:

• first and second electrodes each having opposing surfaces defining a serpentine fluid conduit therebetween, the fluid conduit having an inlet, and outlet and a plurality of collection areas formed sequentially within the fluid conduit between the inlet and the outlet, wherein the fluid conduit is structured and arranged to direct gas flow through the fluid conduit so that gravitational forces act to collect particulate matter flowing through the fluid conduit and inhibit egress of the particulate matter from the collection areas wherein the fluid conduit includes first and second at least partially vertical passages communicating each collection area with the inlet and outlet;
• wherein said second electrode includes a base portion and a plurality for first and second wall members extending vertically away from said base portion, said plurality of first wall members extending upward from said base portion and said plurality of second wall members extending downward from said base portion, each of the first and second pluralities of wall members being spaced apart from each other to define channels therebetween;
• wherein said first electrode includes upper and lower base portions and a plurality of third and fourth wall members, said plurality of third wall members extending vertically away from said upper base portion into the channels defined by the first plurality of wall members to form an upper portion of the fluid conduit therebetween, said plurality of fourth wall members extending vertically away from said lower base portion into channels defined by the second plurality of wall members to form a lower portion of the fluid conduit therebetween;
• and
• wherein the distance between said opposing electrode surfaces in said upper portion of said fluid conduit defined by said first and third pluralities of wall members is shorter than the distance between said opposing electrode surfaces in said lower portion of said fluid conduit defined by said second and fourth pluralities of wall members.

An apparatus for collecting particles exhausted from a substrate processing chamber the apparatus comprising:

• first and second electrodes each having opposing surfaces defining a serpentine fluid conduit therebetween, the fluid conduit having an inlet, and outlet and a plurality of collection areas formed sequentially within the fluid conduit between the inlet and the outlet, wherein the fluid conduit is structured and arranged to direct gas flow through the fluid conduit so that gravitational forces act to collect particulate matter flowing through the fluid conduit and inhibit egress of the particulate matter from the collection areas, wherein the fluid conduit includes first and second at least partially vertical passages communicating each collection area with the inlet and outlet;
• wherein said second electrode includes a base portion and a plurality of first and second wall members extending vertically away from said base portion, said plurality of first wall members extending upward from said base portion and said plurality of second wall members extending downward from said base portion, each of the first and second pluralities of wall members being spaced apart from each other to define channels therebetween;
• wherein said first electrode includes upper and lower base portions and a plurality of third and fourth wall members, said plurality of third wall members extending vertically away from said upper portion into the channels defined by the first plurality of wall members to form an upper portion of the fluid conduit therebetween, said plurality of fourth wall members extending vertically away from said lower base portion into channels defined by the second plurality of wall members to form a lower portion of the fluid conduit therebetween;
• wherein said first plurality of wall members includes a center wall member that divides gas flow through said fluid conduit into left and right portions;
• and
• wherein said center wall members of said second electrode includes an upper edge having an angle of 30 degrees or less.

An apparatus for minimizing deposition in an exhaust line, the apparatus comprising:

• a first electrode comprising an electrode wall enclosing an inner chamber therein, the electrode wall defining an inlet and an outlet in communication with the inner chamber;
• a second electrode disposed within the inner chamber but not in electrical contact with said first electrode, the first and second electrodes having opposing surfaces defining a fluid conduit therebetween, the fluid conduit communicating the inlet with the outlet and defining one or more collection areas therebetween, the fluid conduit being structured and arranged to direct gas flow around at least one bend of the fluid conduit defining a collection area that inhibits egress of particulate matter from the apparatus;
• means, operatively coupled to the first and second electrodes, for applying a voltage between the electrodes to collect electrically charged particulate matter on the opposing electrode surfaces;
• and
• means, operatively coupled to supply RF power to at least one of the electrodes to form a plasma within said fluid conduit.

An apparatus for minimizing deposition in an exhaust line, the apparatus comprising:

• a first electrode comprising an electrode wall enclosing an inner chamber therein, the electrode wall defining an inlet and an outlet in communication with the inner chamber;
• a second electrode disposed within the inner chamber but not in electrical contact with said first electrode, the first and second electrodes having opposing surfaces defining a fluid conduit therebetween, the fluid conduit communicating the inlet with the outlet and defining one or more collection areas therebetween, the fluid conduit being structured and arranged in direct gas flow around at least one bend of the fluid conduit defining a collection area that inhibits egress of particulate matter from the apparatus;
• a first power supply operatively coupled to the first and second electrodes, configured to apply a voltage between the electrodes to collect electrically charged particulate matter on the opposing electrode surfaces;
• and
• a second power supply operatively coupled to supply RF power to at least one of the electrodes to form a plasma within said fluid conduit.