US 6,191,897 B1 · Beam alignment correction element assembly

Abstract

A correction element assembly for correcting misalignment of a beam of radiation with respect to a location on a target includes a correction element housing, and first and second piezo elements. The correction element is fixedly mounted in the housing and moveable therewith. The piezo elements are supported by a member having a first portion and a second portion. The first piezo element is mounted to the first portion of the member and to said housing, and moves the housing in a first direction. The second piezo element is mounted to the second portion of the member and to a base, and moves the housing in a second direction substantially perpendicular to the first direction.

Claims13

Dependent claims

A correction element assembly for correcting misalignment of a beam of radiation with respect to a location on a target, comprising:

a housing having a correction element fixedly mounted therein and moveable therewith;
a member having a first portion and a second portion;
a first piezo element mounted to the first portion of the member and to said housing and configured to move said housing in a first direction;
and
a second piezo element mounted to the second portion of the member and to a base, and configured to move said housing in a second direction substantially perpendicular to said first direction;
wherein said correction element has a beam axis and said movement of said housing causes said correction element to move substantially orthogonal to said beam axis.

3 more elements

Dependencies are inferred from the claim text.

Beam alignment correction element assembly

Life of this patent

Beam alignment correction element assembly

Life of this patent

Abstract

Claims13