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US 6,191,855 B1Granted
Apparatus and method for the determination of grain size in thin films
AssigneeBrown University Research Foundation
InventorHumphrey J Maris
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Abstract
A method for the determination of grain size in a thin film sample comprising the steps of measuring first and second changes in the optical response of the thin film, comparing the first and second changes to find the attenuation of a propagating disturbance in the film and associating the attenuation of the disturbance to the grain size of the film. The second change in optical response is time delayed from the first change in optical response.
Claims8
A method for determining grain size in a sample, the method comprising the steps of:
- inducing a propagating disturbance in the sample by an application of at least one pulse of electromagnetic energy to the sample from a pump beam;
- measuring a first change in optical response of the sample to a pulsed probe beam by measuring a change Δφ in optical phase of a portion of the probe beam;
- measuring a second change in optical response of the sample to the pulsed probe beam by measuring the change Δφ in optical phase of the portion of the probe beam, the second change in optical response being time delayed from the first change in optical response of the sample;
- comparing the first change in optical response of the sample to the second change in optical response of the sample to determine an amount of attenuation of the propagating disturbance in the sample;
- and
- associating the amount of attenuation of the propagating disturbance in the sample with a grain size of the sample.
3 more elements
Dependencies are inferred from the claim text.