Contactless method for measuring total charge of an insulating layer on a substrate using corona charge
OwnerTom G. Miller, Roger L. Verkuil +1inventors
InventorsTom G. Miller, Roger L. Verkuil, Gregory S. Horner
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Abstract
A method of measuring total charge of an insulating layer on a semiconductor substrate includes applying corona charges to the insulating layer and measuring a surface photovoltage of the insulating layer after applying each of the corona charges. The charge density of each of the corona charges is measured with a coulombmeter. A total corona charge required to obtain a surface photovoltage of a predetermined fixed value is determined and used to calculate the total charge of the insulating layer. The fixed value corresponds to either a flatband or midband condition.
Claims11
A method for measuring a total charge of an insulating layer on a substrate, said method comprising the steps of:
- (a) depositing measured amounts of corona charges on the insulating layer;
- (b) measuring a surface photovoltage for the insulating layer after depositing each of said measured amounts;
- (c) determining a total corona charge from said measured amounts corresponding to obtaining a surface photovoltage measurement equal to a predetermined fixed value;
- and
- (d) using said total corona charge to determine the total charge of the insulating layer.
Dependencies are inferred from the claim text.