IC device under test temperature control fixture

Abstract

A temperature control fixture for an integrated circuit under test which provides for heating or cooling of the back side of the integrated circuit while it is being tested by contacts and electrical leads applied to the opposite lead side thereof. A test housing defines a sealed test chamber within which a test mounting is provided for mounting the integrated circuit under test. The test mounting is connected to a plurality of test lines for conducting test signals between the lead side of the integrated circuit and a test instrument external to the test apparatus. The integrated circuit is mounted on the test mounting to expose the back side thereof to a flow of a heat transfer medium in the sealed test chamber to provide for cooling or heating thereof. An observation window in the test housing enables observation of the back side of device during testing.

Dependencies are inferred from the claim text.