Method for detecting a contact position between an object to be measured and measuring pins

A semiconductor test system for detecting a position where measuring pins are brought into contact with an object to be measured, comprising:

• a semiconductor test device coupled to the measuring pins and configured to determine the number of pins that contact the object;
• and
• a control unit coupled to the semiconductor test device and configured to:
• raise a stage having the object carried thereon in multiples of a first predetermined distance until at least a predetermined number of pins contact the object,
• lower the stage in multiples of the first predetermined distance until less than the predetermined number of pins contact the object,
• raise the stage in multiples of a second predetermined distance smaller than the first predetermined distance until at least the predetermined number of pins contact the object, and
• determine the position of the stage as the position, when the predetermined number of pins contacts the object.

A test system for detecting a position where measuring pins are brought into contact with an object to be measured, comprising:

• a semiconductor test device coupled to the measuring pins and configured to determine the number of pins that contact the object;
• and
• a control unit coupled to the semiconductor test device and configured to:
• raise a stage having the object carried thereon in multiples of a first predetermined distance until at least a predetermined number of pins contact the object,
• lower the stage in multiples of the first predetermined distance until less than the predetermined number of pins contact the object,
• raise the stage in multiples of a second predetermined distance smaller than the first predetermined distance until at least the predetermined number of pins contact the object, and
• determine the position of the stage as the position, when the predetermined number of pins contacts the object.