Microactuator and method of manufacturing the same
AssigneeNEC Corporation
InventorKenichiro Suzuki
Life of this patent
Estimating the term…
Abstract
A microactuator includes a stationary element, a movable element, and a first microstructure. The stationary element is fixed on a substrate and has a plurality of stationary element electrodes arranged at a predetermined pitch. The movable element has a plurality of movable element electrodes opposing to the stationary element electrodes. The movable element is moved by applying a voltage across the stationary element and the movable element. The first microstructure is formed on at least one of the opposing surfaces of the movable element and the stationary element to prevent the movable element from attaching to the stationary element.
Claims17
A microactuator comprising:
- a substrate;
- a stationary element fixed on said substrate, and having a plurality of stationary element electrodes arranged at a predetermined pitch;
- a movable element supported above said substrate by a spring member, said movable element having a plurality of movable element electrodes interdigitized with said stationary element electrodes, said movable element operative to be moved by applying a potential across the interdigitized movable and stationary element electrodes, wherein said stationary element and said movable element each have respective opposing surfaces which are substantially perpendicular to said substrate;
- and
- a first microstructure formed on at least one of said opposing surfaces of said movable element and said stationary element, said first microstructure forming a surface roughness to reduce a contact area between said opposing surfaces to prevent said movable element from attaching to said stationary element.
A microactuator comprising:
- a substrate;
- a stationary element fixed on said substrate, said stationary element having a comb tooth portion with a plurality of stationary element electrodes;
- a movable element having a comb tooth portion with a plurality of movable element electrodes, said plurality of movable element electrodes interdigitized with said plurality of said stationary element electrodes, wherein said moving and said stationary element electrodes each have respective opposing surfaces which are substantially perpendicular to said substrate, and wherein said movable element is operative to be moved by applying a voltage across said stationary element and said movable element;
- a stopper disposed between said movable element and said stationary element to prevent collision of said movable element with said stationary element;
- microstructures formed on said stopper and at least one of said opposing surfaces of said movable and stationary element which opposes said stopper, said microstructures forming a surface roughness to reduce a contact area between said stopper and said opposing surfaces of said movable and stationary element which oppose said stopper, to prevent said stopper from attaching to said opposing surfaces of said movable and stationary element.
Dependencies are inferred from the claim text.