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US 6,191,416 B1Granted
Apparatus for producing a beam of atoms or radicals
AssigneeForschungszentrum Julich GmbH
InventorsKarl G. Tschersich, Johannes Fleischhauer
Life of this patent
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Abstract
A stream of gas can be thermally decomposed in a tube along which a radiant heating wire extends to a stream of free atoms or radicals. The wire, which can be formed as a coil is connected at one end of the tube close to its outlet so that the tube provides an electrical contact for the wire and mechanically supports it.
Claims7
An apparatus for producing a stream of atomic particles in the form of free atoms or radicals, said apparatus comprising:
- an elongated heat-conductive and thermally conductive tube formed at one end with means for connecting said tube to a source of a gas capable of being thermally decomposed to form said atomic particles, said tube being formed at an opposite end with an outlet for said stream of atomic particles;
- at least one heating wire extending along said tube and spaced from said tube over at least a major portion of a length of said wire whereby said tube is radiantly heated by said wire to a temperature sufficient to thermally decompose said gas and form said atomic particles, said wire having an electrical contact with said tube at a location proximal to said outlet and being spaced from said tube over a remainder of a length of said wire juxtaposed with said tube;
- and
- an electrical energy source connected to said wire for passing an electric current therethrough to cause said wire to radiantly heat said tube.
1 more element
Dependencies are inferred from the claim text.