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US 6,191,388 B1Granted
Thermal processor and components thereof
AssigneeSemitool, Inc.
InventorsMark P. Cleaver, Gregory J. Wilson, Paul R. McHugh, Larry J. Funk
Life of this patent
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AssigneeSemitool, Inc.
InventorsMark P. Cleaver, Gregory J. Wilson, Paul R. McHugh, Larry J. Funk
Estimating the term…
An injector system for a vertical furnace which has a pedestal and a semiconductor article support within a process container. The injector system includes an injector which is an elongate tube extending into the process chamber. The tube includes a circuitous section in the area of the pedestal to increase residence time for the contents of the tube prior to introduction to the semiconductor articles. A substantially direct section leads from the circuitous section to a discharge end located above the semiconductor article support. The injector system further includes a vertical column heater arranged with the vapor outlet at the upper end of the heater connected via a coupling to the injector in an arrangement to reduce thermal loss.
An injector for a vertical furnace having a pedestal, a process container and a semiconductor article support, the semiconductor article support being on the pedestal, the process container including a process chamber therein, the process chamber being positionable to enclose the semiconductor article support and the pedestal, the injector comprising
An injector for a vertical furnace having a process container, the process container including a process chamber therein, the injector comprising
A vertical furnace for treating a plurality of semiconductor articles, comprising
A vertical furnace for treating a plurality of semiconductor articles, comprising
Dependencies are inferred from the claim text.