Spacer patterned, high dielectric constant capacitor
AssigneeMicron Technology, Inc.
InventorDarwin A. Clampitt
Life of this patent
Estimating the term…
Abstract
A high dielectric constant memory cell capacitor and method for producing the same, wherein the memory cell capacitor utilizes relatively large surface area conductive structures of thin spacer width pillars or having edges without sharp corners that lead to electric field breakdown of the high dielectric constant material. The combination of high dielectric constant material in a memory cell along with a relatively large surface area conductive structure is achieved through the use of a buffer material as caps on the thin edge surfaces of the relatively large surface area structures to dampen or eliminate the intense electric field which would be generated at the corners of the conductive structures during the operation of the memory cell capacitor had the caps not been present.
Claims16
A method of producing a large surface area, high dielectric constant capacitor, comprising:
- providing a first conductive material in electrical communication with a drain region on a semiconductor substrate;
- removing portions of said first conductive material to form large surface area structures including top edge portions;
- providing a silicon nitride buffer material along said top edge portions of said large surface area structures;
- applying a high dielectric constant material over said large surface area structures and said silicon nitride buffer material;
- and
- applying a second conductive material over said high dielectric constant material.
A method of producing a memory cell, comprising:
- providing conductive material in electrical communication with a drain region on a semiconductor substrate;
- removing portions of said conductive material to form large surface area structures;
- providing a silicon nitride buffer material over top edge portions of said large surface area structures;
- applying a high dielectric constant material over said large surface area structures and said silicon nitride buffer material;
- and
- applying a conductive material over said high dielectric constant material.
A method of producing a semiconductor DRAM, comprising:
- providing conductive material in electrical communication with a drain region on a semiconductor substrate;
- removing portions of said conductive material to form large surface area structures;
- providing a silicon nitride buffer material over top edge portions of said large surface area structures;
- applying a high dielectric constant material over said large surface area structures and said silicon nitride buffer material;
- and
- applying a conductive material over said high dielectric constant material.
A method of producing a large surface area, high dielectric constant capacitor, comprising:
- providing an intermediate structure comprising a substrate having at least one thick field oxide area and at least one active area including at least one implanted drain region, and at least one implanted source region, said intermediate structure further including at least one transistor gate member spanned between said at least one implanted drain region and said at least one implanted source region on said at least one substrate active area, and a barrier layer substantially covering said at least one thick field oxide area, said at least one substrate active area, and said at least one transistor gate member;
- patterning a first resist layer on said barrier layer;
- etching said barrier layer to expose said at least one implanted drain region in said substrate, forming at least one via;
- stripping said first resist layer;
- depositing a layer of conductive polysilicon material over said etched barrier layer to fill said at least one via;
- etching said polysilicon material, forming a recessed polysilicon plug in said at least one via;
- depositing a layer of metal over said barrier layer and said recessed polysilicon plug;
- forming a metal silicide layer at a contact area of said metal layer and said polysilicon material;
- removing an unreacted portion of said metal layer;
- depositing a metal barrier layer over said metal silicide layer and said barrier layer;
- applying a second resist layer over said metal barrier layer filling said at least one via;
- etching said second resist layer such that a plug of said resist layer remains in said at least one via;
- etching said metal barrier layer to form a bottom contact adjacent said metal silicide layer;
- removing said resist plug;
- depositing a layer of conductive material over said barrier layer and into said at least one via to contact said bottom contact;
- patterning a silicon nitride buffer material on said conductive material layer;
- etching said conductive material layer through said silicon nitride buffer material to form at least one large surface area structure in said conductive material layer;
- depositing a layer of high dielectric constant material over said etched conductive material layer;
- and
- depositing an upper cell plate over said high dielectric constant material layer.
Dependencies are inferred from the claim text.