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US 6,190,778 B1Granted
Process for joining two solid bodies and the resultant structural element
AssigneeDegussa-Huls AG
InventorsChristoph Batz-Sohn, Gertrud Krauter, Ulrich Gosele
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Abstract
A process for joining two solid bodies, in particular of silicon. via the substantially smooth surfaces that have first of all been coated with a monomolecular layer of a sulfur-containing organosilane, and the resultant solid bodies, which may be used in microelectronics or micromechanics.
Claims9
A process for joining substantially smooth surfaces of two solid bodies using organosilicon compounds, comprising:
- applying a monomolecular layer of a compound of the general formula,
- Sy[(CH2)xSi(OR)3]2 (I)
- in which
- R denotes methyl, ethyl, propyl
- x denotes 1, 2, 3 or 4,
- Y denotes 2-6,
- to the substantially smooth surfaces of the two solid bodies and bringing the surfaces of the two solid bodies into contact.
4 more elements
Dependencies are inferred from the claim text.