Thin films having rock-salt-like structure deposited on amorphous surfaces
AssigneeThe Board of Trustees of the Leland Stanford Junior University
InventorsKhiem B. Do, Pin-Chin Connie Wang, Robert H. Hammond, Theodore H. Geballe
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Abstract
A thin film of material having a rock-salt-like structure is deposited on a smooth amorphous substrate surface by ion beam assisted deposition.
Claims61
An article, comprising:
- a substrate comprising a metal alloy, the substrate having at least one smooth amorphous surface, wherein the root mean square roughness of said smooth amorphous surface is less than about 100 angstroms;
- buffer layer comprising a first thin film formed on said amorphous surface of said substrate from a material having a rock-salt-like structure and substantial alignment both in-plane and out-of-plane;
- and
- a second film having substantial alignment both in-plane and out-of-plane formed on a surface of said buffer layer, wherein said first film provides a template for the epitaxial growth of said second film.
A thin film for subsequent epitaxial film deposition comprising
- a substrate comprising a metal alloy, the substrate having a smooth amorphous surface, wherein the root mean square roughness of the smooth amorphous surface of the substrate is less than about 100 angstroms;
- and
- a thin film of a material having a rock-salt-like structure formed on said smooth amorphous surface with substantial alignment both in-plane and out-of-plane.
An article, comprising:
- a substrate comprising a metal alloy, the substrate having a smooth amorphous surface, wherein the root mean square roughness of the smooth amorphous surface of the substrate is less than about 100 angstroms;
- and
- a layer of material having a rock-salt-like structure with substantial alignment in-plane and out-of-plane, the layer of material being disposed on the smooth amorphous surface of the substrate.
An article, comprising:
- a substrate comprising a metal alloy, the substrate having at least one smooth amorphous surface;
- a buffer layer comprising a first thin film formed on the amorphous surface of the substrate from a material having a rock-salt-like structure and substantial alignment both in-plane and out-of-plane, wherein the material having a rock-salt-like structure comprises a nitride;
- and
- a second film having substantial alignment both in-plane and out-of-plane formed on a surface of the buffer layer, wherein the first film provides a template for the epitaxial growth of the second film.
A thin film for subsequent epitaxial thin film deposition comprising
- a substrate comprising a metal alloy;
- and
- a thin film of a material having a rock-salt-like structure formed on the smooth amorphous surface with substantial alignment both in-plane and out-of-plane, wherein the material having a rock-salt-like structure comprises a nitride.
The thin film of 46, wherein the material having a rock-salt-like structure has a rock salt structure.
The thin film of 46, wherein the amorphous surface comprises a nickel alloy.
The thin film of 46, wherein the amorphous surface structure comprises a metal.
An article, comprising:
- a substrate comprising a metal alloy, the substrate having a smooth amorphous surface;
- and
- a layer of material having a rock-salt-like structure with substantial alignment in-plane and out-of-plane, the layer of material being disposed on the smooth amorphous surface of the substrate wherein the material having a rock-salt-like structure comprises a nitride.
Dependencies are inferred from the claim text.