Process for forming thin films of functional ceramics
AssigneeYazaki Corporation
InventorsHisao Suzuki, Tomio Hirano, Tatsuya Wada
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Abstract
A process for forming a functional ceramic thin film eliminating the need of high temperature annealing which has been indispensable in the conventional process is provided. This can be achieved by the process for forming a functional ceramic thin film having a crystal of a composite oxide consisting of two or more metal elements and oxygen, which comprises steps of alternately stacking seeding layers having the same crystalline structure as said composite oxide and formable at a temperature lower than the crystallization temperature of the composite oxide, and layers containing a larger amount of a specified metal element than said seeding layers, and then annealing the resultant layers to form an integral body.
Claims7
A wet coating process for forming a functional ceramic thin film having a crystals of a composite oxide consisting of two or more metal elements and oxygen, the process comprises the steps of alternately stacking seeding layers and composite metal oxide layers to form a resulting stacked layer the seeding layers having the same crystalline structure as said composite metal oxide and formable at a temperature lower than the crystallization temperature of the composite metal oxide, and said composite metal oxide layers containing a greater amount of a designated metal element than said seeding layers, and annealing the resultant layer to form an integral body.
Dependencies are inferred from the claim text.