Dual stage pump system with pre-stressed diaphragms and reservoir
OwnerDavid C. Bailey, Carl A. Martininventors
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OwnerDavid C. Bailey, Carl A. Martininventors
Estimating the term…
An improved dual-stage pump system is provided for the accurate pumping and filtering of viscous fluids. Two hydraulically activated pumps are provided in series with a filter and reservoir disposed in-line between the two pumps. The reservoir acts as a source bottle for the second pump and allows the first pump to pump the viscous fluid through the filter at a rate independent of the dispensing rate of the second pump. By operating the first pump at a rate independent of the second pump, back pressure at the filter is avoided. Each hydraulically activated diaphragm pump is equipped with an improved diaphragm that is pre-formed to the geometries of the process fluid cavity thereby eliminating any inaccuracies in the operation of the pumps due to expansion of retraction of the diaphragm during pump operation.
A liquid delivery system for delivering filtered liquid in precise amounts in the fabrication of electronic components comprising:
A method of delivering filtered viscous liquid in precise amounts in the fabrication of electronic components comprising:
Dependencies are inferred from the claim text.