Spacer spraying device
AssigneeNEC Corporation
InventorAkehiro Matsuda
Life of this patent
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Abstract
A spacer spraying device for spraying a powdery spacer onto, e.g., a substrate for an LCD (Liquid Crystal Display) is disclosed. When the device sprays the spacer onto the top of the substrate in a spray chamber, it prevents the spacer from depositing on the inner side walls and top wall of the chamber and dropping in the form of cohered masses onto the substrate.
Claims10
A spacer spraying device, comprising a spray chamber in which a stage for supporting a substrate is positioned, said spray chamber having inner side walls, a shutter that directs air in said spray chamber, a nozzle for spraying a spacer in said spray chamber toward said stage, an air conduit communicating with said spray chamber and separate from said nozzle, said air conduit feeds air from an outside to an inside of said spray chamber, and an ionizer in communication with said air conduit, wherein said ionizer operates to ionize the air fed into said spray chamber by said air conduit to charge this air to a same polarity of the sprayed spacer to prevent spacer from depositing on said inner side walls of said spray chamber.
Dependencies are inferred from the claim text.